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ReticleSense® Auto Teaching System™ (ATSR)
Improve equipment set-up and long term yields by wirelessly capturing three dimensional off-set data (x, y and z) in real-time to quickly teach reticle transfer positions for proper alignment and set-up of semiconductor tools.
Product Video ReticleSense® Auto Teaching System™ (ATSR)
Demo Presentation ReticleSense® Auto Teaching System™ (ATSR)
Overview
Improve yields and lower particulate contamination with accurate reticle handoff calibration.
Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves through your semiconductor equipment. Improve the yield of your manufacturing process with properly calibrated equipment.
Achieve repeatable and reproducible semiconductor equipment setups.
Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable and reproducible setup and maintenance checks.
Reduce equipment downtime from hours to minutes.
Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to remain sealed during inspection. Increase equipment availability while reducing manpower and consumable expense.
Speed troubleshooting and lower consumable expense with visual inspection.
Improve yields and lower particulate contamination with accurate reticle handoff calibration. Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves through your semiconductor equipment. Improve the yield of your manufacturing process with properly calibrated equipment. Achieve repeatable and reproducible semiconductor equipment setups. Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable and reproducible setup and maintenance checks. Reduce equipment downtime from hours to minutes. Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to remain sealed during inspection. Increase equipment availability while reducing manpower and consumable expense. Speed troubleshooting and lower consumable expense with visual inspection. Receive real-time images as robots move ATSR through the tool. New CyberSpectrum™ software graphical user interface provides x, y and z offsets that eliminate guesswork. Search for lost wafers and pedestal debris without opening the tool.
Features
Wireless, reticle-shaped and battery-powered | Available in 6” reticle shaped form factor |
On-board camera | Reports x-y-z offset from teaching to edges inside the equipment so you can teach reticle transfer coordinates with 5 cameras. Color images with white light illumination. |
Easy-to-use software | CyberSpectrum software included. CyberSpectrum: Displays real-time video and measurements of target features, logs offsets and user comments. Review functionality integrated; replays log file data for review and analysis. |
Durable housing | Reticle quartz housing compatible with most all mask equipment and scanners. |
Lightweight, reticle-like mass and mass distribution | 230 gms ±10% |
Body thickness | Body: 6.35 mm; standard 6” reticle format. |
Operating pressure | <10-6 to 760 torr |
Operating temperature | 20 to 60 degrees C |
Wireless communications mode | Bluetooth |
Operating systems | Windows 10 |
Product components | Teaching device, charging clean case, carrying suitcase, accessory communication gateway |
Calibration | Factory recalibration recommended annually |
Battery-operation | Less than 2 hrs. per charge |
Working distance | 38 mm to 42 mm |
Measurement Repeatability | 0.025 mm at nominal focus* |
Accuracy | 0.050 mm at nominal focus* |