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SAVE TIME. TAKE A BREAK

当您需要半导体工具设置和维护过程中最高效和有效的测量设备时, count on lol菠菜软件, 无线半导体腔隙测量设备的全球市场领导者, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.

Semiconductor fabs and OEMs value the accuracy, WaferSense和ReticleSense测量产品组合的精度和多功能性,可提高晶圆厂产量和设备正常运行时间.

 

Save Time & Expense

  • Improve yields and increase tool uptime
  • Increase throughput
  • Reduce resource needs
  • Speed equipment set-up, maintenance cycles, trouble-shooting, qualification and release to production
  • Speed tool optimization, stabilization and standardization
  • Streamline fab processes
  • Establish repeatable and verifiable standards

Most Efficient and Effective

Since the wireless, 支持蓝牙®和电池供电的设备呈晶圆状或十字形, they can generally travel anywhere a wafer or reticle travels, 提供最佳的易用性和访问位置,否则可能很难或不可能到达.

Vacuum Compatible

校准可以在封闭的过程条件下与真空兼容的WaferSense和ReticleSense测量设备进行.

Intuitive Software

接收和记录数据实时在您的笔记本电脑与lol菠菜软件易于使用的软件,并指望准确, precise, 与传统或遗留方法相比,可靠且可重复的结果节省了时间和费用.

Application:
Type:

ReticleSense® Auto Teaching System™ (ATSR)

ATSR
  • 快速教授准确的晶圆和网线切换校准,以正确对准和设置半导体工具.
  • “看到”工具内捕获三维偏移数据(x, Y和z)实时快速教晶圆和网线转移位置-所有不需要打开工具.
  • Conduct repeatable and reproducible setups and maintenance checks, 加快故障排除,消除技术人员之间的差异.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Teaching System™ (ATS2)

ATS
  • 通过精确的晶圆移交校准,提高产量,降低颗粒污染.
  • 实现可重复和可复制的半导体设备设置.
  • Reduce equipment downtime from hours to minutes.
  • 通过目视检查,快速排除故障,降低耗材费用.

WaferSense® Auto Resistance Sensor™ (ARS)

ARS
  • 采用片状4线电阻传感器,缩短设备维护周期.
  • 通过对一段时间内测量的平均电阻进行定量分析,预测工具何时需要维护.
  • 通过客观和可重复的电阻测量提高细胞间过程的均匀性.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Vibration and Leveling Sensor™ (AVLS3)

AVLS3
  • Speed equipment qualification with wireless measurements.
  • 薄而轻的晶圆样外形缩短设备维护周期.
  • 通过客观和可重复的数据,降低设备维护费用,提高工艺一致性.
  • Includes CyberSpectrum™ Software

WaferSense® Airborne Particle Sensor™

APS1, 2 & 3
  • 快速监测,识别和排除空气中的颗粒低至0.半导体工艺设备和自动化物料处理系统中的14um.
  • 易于识别何时何地颗粒起源和测量的有效性,清洁调整和维修实时.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Multi Sensor™

AMS
  • Speed equipment qualification with wireless measurements.
  • 薄而轻的晶圆样外形缩短设备维护周期.
  • 降低设备维护费用,通过客观和可重复的数据提高工艺一致性.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Gapping System™ (AGS)

AGS
  • 加速非接触式间隙测量和平行度调整下
    用于半导体工艺的真空,如薄膜沉积、溅射和蚀刻.
  • Improves uniformity, tool availability and repeatability.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Vibration System™ (AVS)

AVS
  • 监测三轴加速度和振动,通过最大化加速度和最小化振动来提高产量.
  • 记录振动数据,便于比较过去和现在, as well as one tool to another, to reduce particles, maintenance time and cycle time.
  • Includes CyberSpectrum™ software.

WaferSense® Auto Leveling System 2 Vertical™ (ALS/ALS2V)

ALS2V
  • Speeds setting the right inclination by measuring pitch, roll, rise overrun and vertical inclinations.
  • 快速准确地设置跨工具的相同水平,以获得更好的过程均匀性.
  • Includes CyberSpectrum™ software.

ReticleSense® Airborne Particle Sensor™ (APSR/APSRQ)

APSR / APSRQ
  • 快速监测,识别并排除空气中颗粒的故障
    0.14um within semiconductor process equipment and
    automated material handling systems.
  • Easily identifies when and where the particles originate
    并实时测量清洁调整和维修的有效性.
  • Includes CyberSpectrum™ software.

ReticleSense® Auto Multi Sensor™ (AMSR)

AMSR
  • Speed equipment qualification with wireless measurements.
  • 缩短设备维护周期,具有类似于网线的外形因素.
  • 降低设备维护费用,通过客观和可重复的数据提高工艺一致性.
  • Includes CyberSpectrum™ software.

In-line Particle Sensor™ (IPS™)

IPS
  • Speed equipment qualification with real-time 24/7 monitoring.
  • Shorten equipment maintenance cycles with inline particle sensing.
  • Lower equipment expenses with objective and reproducible data.
  • Includes CyberSpectrum™ software.

CyberSpectrum™ Software

软件WAFERSENSE®•RETICLESENSE®•在线颗粒传感器™

CyberSpectrum是一个功能强大但非常简单的软件,具有直观的界面,为多种应用的实时测量和分析提供数字和视觉反馈.

WaferSense® SDK

SOFTWARE DEVELOPMENT KIT

WaferSense软件开发工具包为WaferSense®和ReticleSense®系列设备提供应用程序编程接口(API). 这允许将设备直接集成到用户开发的软件应用程序中.

NanoResolution MRS® Sensor

Powered by MRS® Technology

用于OEM集成的晶圆级和先进封装应用的纳米分辨率MRS传感器.

SQ3000 CMM for Semiconductor Applications

速度和精度的终极坐标测量应用-秒. Not Hours

EX-Q Wafer Mapping Sensor

A DRAMATIC STEP FORWARD IN WAFER DETECTION

EX-QS Wafer Mapping Sensor

GOOD THINGS DO COME IN SMALL PACKAGES

Digital and Analog Frame Grabbers

DEPENDABLE, QUICK SETUP MACHINE VISION COMPONENTS